Pneumatic UHV Gate Valve

VAT's Series 108 Pneumatic UHV Gate Valve is the standard valve for ultra-high vacuum (UHV) isolation applications in research and industry. Pneumatic valves come standard with a position indicator and without a solenoid valve. Solenoid valves are available upon request.

Technical Data

• Leak rate:
  • valve body: < 5x10^-10 mbar ls^-1
  • valve seat: < 1x10^-9 mbar ls^-1
• Pressure range:
  • DN 63–200: 1x10^-10 mbar to 1.6 bar (abs)
  • DN 250–320: 1x10^-10 mbar to 1.2 bar (abs)
• Differential pressure on the gate: 
  • DN 63–200: ≤ 1.6 bar
  • DN 250–320: ≤ 1.2 bar
• Differential pressure at opening: ≤ 30 mbar
• Cycles until first service: 50,000
• Temperature:
  • Valve body: ≤ 250°C open / ≤ 200°C closed
  • Pneumatic actuator: ≤ 200°C
  • Solenoid valve: ≤ 50°C
  • Position indicator: ≤ 80°C
• Heating and cooling rate: ≤ 50°C h^-1
• Material:
  • Valve body: AISI 304 (1.4301)
  • Mechanism:
    • DN 63–200: AISI 316L (1.4404)
    • DN 250–320: AISI 304 (1.4301)
  • Bellows: AISI 316L (1.4404, 1.4435)
• Seal:
  • Bonnet: metal
  • Gate: FKM (Viton)
• Mounting position: any
• Solenoid valve: 24 V DC, 5.4 W (others on request)
• Position indicator contact rating:
  • Voltage: ≤ 50 V AC/DC
  • Current: ≤ 1.2 A
• Valve position indication: visual (mechanical)